Thetotal ionizing dose irradiation effects are investigated in Si vertical diffusedMOSFETs (VDMOSs) with different gate dielectrics\nincluding single SiO2 layer and double Si3N4/SiO2 layer. Radiation-induced holes trapping is greater for single SiO2 layer than for\ndouble Si3N4/SiO2 layer. Dielectric oxidation temperature dependent TID effects are also studied. Holes trapping induced negative\nthreshold voltage shift is smaller for SiO2 at lower oxidation temperature. Gate bias during irradiation leads to different
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