This article presents all steps between the advanced design and the production\nof CMOS compatible thermoelectric effect infrared sensors dedicated to\nsmart home applications. It will start by making a comparison between thermopile,\nbolometer and pyroelectric technologies. Although sensitivity performances\navailable with bolometers appear to be better at first sight, it is\nfound that thermopiles have non-negligible advantages that make them more\nsuitable for this application field. Then the different steps necessary for the\ndesign will be described, starting from the thermoelectric model of the sensor\n(temperature gradient, electrical sensitivity, etc.) and considering all steps up\nto technological manufacturing in a clean room. The results obtained on the\nstructures produced on a specific computer-controlled measurement bench\n(temperature regulation with an onboard preamplification card) will be presented.\nFinally, the results prove that the square structures have better performances\n(S = 82 V/W and NETD = 208 mK).
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