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Inventi Impact: VLSI

Articles

  • Inventi:evs/32755/20
    Research on a CMOS-MEMS Infrared Sensor with Reduced Graphene Oxide
    Research 2020 : October - December
    Shu-Jung Chen, Bin Chen

    In this research, a new application of reduced graphene oxide (rGO) for a complementary\nmetal-oxide-semiconductor (CMOS)-MEMS infrared (IR) sensor and emitter is proposed. Thorough\ninvestigations of IR properties including absorption and emission were proceeded with careful\ncalibration and measurement with a CMOS thermoelectric sensor. The thermocouples of the sensor\nconsist of aluminum and n-polysilicon layers which are fabricated with the TSMC 0.35.............

    How to Cite this Article
    Attribution/ CC Compliant Citation:Chen, Shu-Jung, and Bin Chen. \"Research on a CMOS-MEMS Infrared Sensor with Reduced\nGraphene Oxide.\" Sensors 20.14 (2020): 4007.\nhttps://doi.org/10.3390/app10093183, http://creativecommons.org/licenses/by/4.0/\nSome formatting elements, header, footer, logos, dates and pagination were modified while adapting this article.
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