The mechanical model of the shape memory alloy (SMA) composite film with silicon (Si) substrate was established by the method\nof mechanics of composite materials. The coupled action between the SMA film and Si substrate under thermal loads was analyzed\nby combining static equilibrium equations, geometric equations, and physical equations. The material nonlinearity of SMA and\nthe geometric nonlinearity of bending deformation were both considered. By simulating and analyzing the actuation performance\nof the SMA composite film during one cooling-heating thermal cycle, it is found that the final cooling temperature, boundary\ncondition, and the thickness of SMA film have significant effects on the actuation performance of the SMA composite film. Besides,\nthe maximum deflection of the SMA composite film is affected obviously by the geometric nonlinearity of bending deformation\nwhen the thickness of SMA film is very large.
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