This paper presents a triple-finger gripper driven by a piezoceramic (PZT) transducer for\nmulti-target micromanipulation. The gripper consists of three fingers assembled on adjustable\npedestals with flexible hinges for a large adjustable range. Each finger has a PZT actuator,\nan amplifying structure, and a changeable end effector. The moving trajectories of single and\ndouble fingers were calculated and finite element analyses were performed to verify the reliability of\nthe structures. In the gripping experiment, various end effectors of the fingers such as tungsten probes\nand fibers were tested, and different micro-objects such as glass hollow spheres and iron spheres with\ndiameters ranging from 10 to 800 �¼m were picked and released. The output resolution is 145 nm/V,\nand the driven displacement range of the gripper is 43.4 �¼m. The PZT actuated triple-finger gripper\nhas superior adaptability, high efficiency, and a low cost.
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