Nano-positioning technology has been widely used in many fields, such as microelectronics,\noptical engineering, and micro manufacturing. This paper presents a one-dimensional (1D)\nnano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective\ntopological optimal structure. The combination of a nano-positioning stage and a feedback capacitive\ncomb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is\nused to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis\nand experimental verification, better static performance and smaller kinetic coupling are achieved.\nThe output displacement of the system achieves a long-stroke of up to 14.7 �¼m and high-resolution\nof less than 3 nm. It provides a flexible and efficient way in the design and optimization of the\nnano-positioning system.
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