The qualitative agreement between experimental measurements of the Q factors and flexural resonance frequencies in air of\r\nmicrocantilevers and calculations based on the compressible fluid model of Van Eysden and Sader (2009) is presented. The Q\r\nfactors and resonance frequencies observed on two sets of cantilever arrays were slightly lower than those predicted by the model.\r\nThis is attributed to the individual design and geometry of the microfabricated hinged end of the cantilever beams in the array.
Loading....