Zinc oxide (ZnO) nanoparticle gas sensor was formed by spin coating.We annealed the film at 400, 600, and 800?C for 1 hour in air\r\nto make gas sensor. The responses of gas sensor to ethanol with UV light illumination were investigated. It could be observed that\r\nthe ZnO nanoparticle film annealing at 800?C has the highest sensitivity. It can be attributed to the defects of ZnO nanoparticle\r\nfilm annealing at 800?Cmuch more than other annealing temperatures. The study shows that the ZnO nanoparticles have potential\r\napplications as RT ethanol sensors
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