We have calculated the nucleation region (NR) location of Si nanocrystal grains prepared by pulsed laser ablation (PLA) with fluence\nof 4 J/cm2 in 10 Pa gas at room temperature, and ambient gases were He, Ne, and Ar, respectively. Results of calculation indicated\nthat NR width in Ne gas was narrowest, while it was widest in He gas.Maximum mean size of grains deposited on substrates under\nablated spot, which were placed horizontally, was the smallest in Ne gas. It would be attribute to more effective energy transfer\nduring the process of collision when atomic mass of Si and ambient gas Ne are more close to each other. In this work, an additional\ngas flow with the same element as ambient gas was introduced, which is vertical to the plume axis at different lateral positions above\nablated spot.
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