This paper presents a high-sensitivity hydrophone fabricated with a Microelectromechanical Systems (MEMS) process using\nepitaxial thin films grown on silicon wafers. The evaluated resonant frequency was calculated through finite-element analysis\n(FEA). The hydrophone was designed, fabricated, and characterized by different measurements performed in a water tank, by\nusing a pulsed sound technique with a sensitivity of âË?â??190 dB Ã?± 2 dB for frequencies in the range 50ââ?¬â??500Hz. These results indicate\nthe high-performance miniaturized acoustic devices, which can impact a variety of technological applications.
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