Microwave-assisted chemical bath deposition (MW-CBD) was used to deposit zinc oxide nanorods (ZnO-NRs) films by using\ndifferent microwave irradiation time.The films exhibit a good crystallinity having a hexagonal wurtzite phase formation. Although\nthe dominant preferred orientation was not observed for the ZnO-5 and ZnO-10, ZnO-8 showed (002) preferred orientation.The\nemission scanning electron microscope (FESEM) showed almost randomly oriented hexagonal nanorods on the surface. A slight\ndecrease in the length of the observed hexagonal nanorods due to the increase in the irradiation time was observed, changing from\n550 nm to 300 nm. The p-Si/n-ZnO-NRs heterojunction photodiodes were fabricated. The current-voltage characteristics of these\nphotodiodes were investigated under dark and different illumination intensity. An increase in the reverse current with increasing\nillumination intensity confirmed that the fabricated photodiodes exhibited a photoconducting behavior. In addition, the barrier\nheight and series resistance values of the photodiodes were determined from capacitance-voltage measurements.
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