The hysteresis characteristics resulted from piezoelectric actuators (PAs) and the\nresidual vibration in the rapid positioning of a two-dimensional piezo-driven microdisplacement\nscanning platform (2D-PDMDSP) will greatly affect the positioning\naccuracy and speed. In this paper, in order to improve the accuracy and speed of the\npositioning and restrain the residual vibration of 2D-PDMDSP, firstly, Utilizing an\nonline hysteresis observer based on the asymmetrical Bouc-Wen model, the PA with\nthe hysteresis characteristics is feedforward linearized and can be used as a linear actuator;\nsecondly, zero vibration and derivative shaping (ZVDS) technique is used to eliminate\nthe residual vibration of the 2D-PDMDSP; lastly, the robust model reference adaptive\n(RMRA) control for the 2D-PDMDSP is proposed and explored. The rapid control\nprototype of the RMRA controller combining the proposed feedforward linearization\nand ZVDS control for the 2D-PDMDSP with rapid control prototyping technique\nbased on the real-time simulation system is established and experimentally tested,\nand the corresponding controlled results are compared with those by the PID control\nmethod. The experimental results show that the proposed RMRA control method can\nsignificantly improve the accuracy and speed of the positioning and restrain the residual\nvibration of 2D-PDMDSP.
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