A novel T-shaped piezoelectric ZnO cantilever sensor for chem/bio-detection is designed and fabricated with MEMS technology.\r\nBy using Rayleigh-Ritz method, the fundamental resonant frequency formula of T-shaped cantilevers is deduced for the first time\r\nand is validated by simulation results and experimental results. From this formula, we can easily find the superiority of adopting\r\nT-shape for the cantilevers. The complete process of the cantilever sensor is then successfully developed. The cantilever sensor\r\nis actuated by a layer of high-quality ZnO film with preferred (002) orientation, which is evaluated by SEM and XRD. The key\r\nstep of the process is protecting the ZnO film from KOH etching by a novel and effective method, which has rarely appeared\r\nin the literature. Finally, this cantilever sensor is measured by a network analyzer, and it has a fundamental resonant frequency\r\nof 24.60 kHz. The cantilever sensor developed in this study illustrates the feasibility and potential for many miniaturized sensor\r\napplications.
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