Comb-drive devises have been widely applied in many fields. However, the\napplication of high frequency sensor, such as rocket chamber, still remains\nproblems. In this work, a finite element code was used for the design, optimization\nand visualization of a comb drive accelerator. In the simulation results,\nthe post-optimization design has high performance in high frequency oscillation\noperating environment. The optimization is based on the ideal eigenfrequency\nand Nelder-Mead method. The 3-D working conditions are realized\nby testing and comparing the time and frequency domain of pre-optimized\nand optimized design whose frequency ranges from 2000 Hz to 5000 Hz. Finally,\nthe electric potential and capacitance in comb drive are visualized,\nwhich shows the better electric signals and displacements.
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