Due to its unique properties such as high hardness, light transmittance, thermal\nconductance, chemical stability and corrosion resistance, diamond has\ndrawn tremendous attention in last two decades. These specific properties\nmade diamond film a promising material for cutting tools, microwave windows,\nheat sinks for electronic devices and diamond electrodes. However, the\ndiamond film with grain sizes at microscale usually exhibits high surface\nroughness and hinders its applications in the microelectro mechanical system\n(MEMS) and biological field because it is difficult to be polished by mechanical\nand chemical methods. With the development of the chemical vapor deposition,\nthe nanocrystalline diamond (NCD) film has been fabricated and\nfound new applications. The grain size of NCD film is in the range of 10 to\n100 nm, which inherits the properties of the diamond and possesses the\nunique properties of the nanoscale materials, and the morphology of the NCD\nfilm is granular or needle-like structure. The microwave plasma chemical vapor\ndeposition (MPCVD) has been regarded as the most promising method to\ndeposit NCD film at low temperature. Compared to the hot filament CVD,\nMPCVD can grow high quality NCD film avoiding of the contamination from\nthe filament materials. The MPCVD technique has high plasma density to activate\ncarbonaceous compound and grow NCD film in high growth rate and\nlow substrate temperature. The unique properties of NCD film, such as the\nsuperior electrical, mechanical and biological properties facilitate their application\nin various fields. The biological application, especially as a biocompatible\ncoating, mainly includes the joint replacement implants and protective\ncoatings and the ophthalmological prosthesis.
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