Devices used for glucose measurement are generally realized by the use of electrochemical detection methods. In this paper, MEMS (micro electro mechanical systems) capacitive glucose sensor measures glucose molecule’s concentration in the human blood sample through detection of capacitance generated in the fixed beam structure due to variation in the displacement of upper beam which is directly proportional to the weight of glucose accumulated over the beam. Glucose is accumulated over the beam by its reaction with the glucose sensing polymer PHEAA-ran-PAAPBA [poly (N – hydroxyethylacrylamide – ran – 3 - acrylamidophenylboronicacid)] considered over the beam. The other beam with reference polymer PAA (polyacrylamide) over it is neutral to the glucose molecule is used to get the differential value of the capacitance for more accurate results. The differential capacitance is taken into consideration for effective rejection of environmental interferences such as osmotic pressure, variation in temperature, changes in acceleration due to gravity at different altitudes. Fixed beams can be used in measuring glucose from blood samples by invasive technique and by urine sample for non-invasive technique under consideration. The simulation results of the sensor are presented using coventor and comsol software. The sensitivity of this sensor has been increased/ optimized by varying sensor parameters like the material of the beam, distance between the two electrodes or surfaces of the beam, increasing the surface area of electrode and proper selection of the polymers.
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