Acceleration is a significant parameter for monitoring the status of a given objects.\nThis paper presents a novel linear acceleration sensor that functions via a unique physical mechanism,\nthe resonant optical tunneling effect (ROTE). The accelerometer consists of a fixed frame, two elastic\ncantilevers, and a major cylindrical mass comprised of a resonant cavity that is separated by two\nair tunneling gaps in the middle. The performance of the proposed sensor was analyzed with a\nsimplified mathematical model, and simulated using finite element modeling. The simulation results\nshowed that the optical Q factor and the sensitivity of the accelerometer reach up to 8.857 Ã?â?? 107 and\n9 pm/g, respectively. The linear measurement range of the device is Ã?±130 g. The work bandwidth\nobtained is located in 10ââ?¬â??1500 Hz. The results of this study provide useful guidelines to improve\nmeasurement range and resolution of integrated optical acceleration sensors.
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