Recently, the demand for accuracy measurement of microstructures has been remarkable.\nWe have been developing a measurement system for microstructures using a stylus made of an\noptical fiber and prisms. In this measurement system, the oblique irradiation of the laser beam was\nemployed to detect the displacement of the stylus shaft generated by contact between the stylus tip\nand the measured surface, and to expand the measurable area and depth. After these evaluations,\nwe discovered that the sensitivity was enhanced with the increase in the incident angle of the laser\nbeam on the stylus shaft. Therefore, in this study, we focus on the effect of the incident angle of light\non the measurement sensitivity. First, the enhancement sensitivity is confirmed by using the basic\nexperimental apparatus. Next, the relationship between the incident angle of the laser beam and the\nsensitivity is theoretically examined using the 3D ray-tracing method. Finally, the factor of the\nsensitivity enhancement is analyzed using the same method. As a result, it was confirmed that the\nsensitivity was enhanced with the increase in the incident angle of the laser beam on the stylus shaft.
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