With valuable physicochemical properties, yttria-stabilized zirconia crystal has promising advantages in optical applications. In this paper, the waveguide effect is observed in yttria-stabilized zirconia crystal irradiated by energetic oxygen ions. The waveguide properties and the field intensity are analyzed using prism and end-face coupling method arrangements, and the results show that monomode is found in the near-surface region and the light beam can be well confined in the waveguide structure, which shows refractive index distribution of the barrier-wall and enhanced-well type. The lattice damage induced by irradiation is investigated by the Rutherford backscattering/ channeling experiment and high-resolution X-ray diffraction techniques. The simulation results are in good agreement with the experimental data.
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